Authors: Chi-Yuan Lee and Yun-Min Liu, Ten-Lom Chen, Yen-Pu Huang
By using micro-electro-mechanical systems (MEMS), this work develops flexible four-in-one (temperature, voltage, current and flow) micro sensor on a flexible substrate. The flexible four-in-one micro sensor use polyimide as the protective layer, owing to its high temperature resistance. This paper will involve designing and fabricating the flexible four-in-one micro sensor. A programmable thermal shock tester and a programmable temperature and humidity tester were used to simulate the inner environment of the low temperature proton exchange membrane fuel cell. The calibration curves reveal repeatability and highly linear of the flexible four-in-one micro sensor. After calibrated and its reliability confirmed, the flexible four-in-one micro sensor will inserted into the low temperature proton exchange membrane fuel cell for local microcosmic measurement.
Keywords: MEMS; flexible four-in-one micro sensor; thermal shock testing and constant temperature and humidity testing; reliability and durability testing