Authors: Chi-Yuan Lee and Fang-Bor Weng, Yun-Min Liu, Yi-Shine Ou
This study developed an integrated (flow, voltage and temperature) micro sensor using micro-electro-mechanical systems (MEMS) technology, and embedded it in high temperature proton exchange membrane fuel cell (HT-PEMFC) for local real-time measurement. This integrated micro sensor was made on a 40μm thick stainless steel substrate, and the protective layer was made of polyimide (PI) with better temperature tolerance. The proposed design has advantages of three sensing functions, compactness, acid corrosion resistance, good temperature tolerance, short response time, real-time measurement and applicability to any position. Moreover, it has good reliability after calibration, and is embedded in the high temperature proton exchange membrane fuel cell for local microscopic measurement.
Keywords: MEMS; integrated micro sensor; HT-PEMFC