Shape memory composite micro-cantilevers with controllable mechanical properties and their application in mass sensors

DOI: 10.5176/2251-1857_M316.21

Authors: Ivo Stachiv, Vincent Mortet, Petr Sittner,

Abstract: In this paper, we present a fundamental theoretical analysis of the micro-sized beams made of silicon and SiO2 substrate materials with deposited thin layers of the NiTi shape memory alloys (SMA). We show that the mechanical properties of such beams can be easily modulated by controlling the phase transformation of the SMA material layers, i.e. temperature. The application potential of such materials with changeable elastic moduli is illustrated on the mass sensors.
Keywords: Hybridized SMA; SMA thin films; SMA modeling; Mass sensors